JPH0714804Y2 - レーザ干渉式デポレートモニタ - Google Patents

レーザ干渉式デポレートモニタ

Info

Publication number
JPH0714804Y2
JPH0714804Y2 JP5936789U JP5936789U JPH0714804Y2 JP H0714804 Y2 JPH0714804 Y2 JP H0714804Y2 JP 5936789 U JP5936789 U JP 5936789U JP 5936789 U JP5936789 U JP 5936789U JP H0714804 Y2 JPH0714804 Y2 JP H0714804Y2
Authority
JP
Japan
Prior art keywords
thin film
film substrate
laser
photodetector
laser interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5936789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02148406U (en]
Inventor
秀樹 古森
利正 友田
田中　　均
陽子 宮崎
進路 馬殿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5936789U priority Critical patent/JPH0714804Y2/ja
Publication of JPH02148406U publication Critical patent/JPH02148406U/ja
Application granted granted Critical
Publication of JPH0714804Y2 publication Critical patent/JPH0714804Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Drying Of Semiconductors (AREA)
JP5936789U 1989-05-22 1989-05-22 レーザ干渉式デポレートモニタ Expired - Lifetime JPH0714804Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5936789U JPH0714804Y2 (ja) 1989-05-22 1989-05-22 レーザ干渉式デポレートモニタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5936789U JPH0714804Y2 (ja) 1989-05-22 1989-05-22 レーザ干渉式デポレートモニタ

Publications (2)

Publication Number Publication Date
JPH02148406U JPH02148406U (en]) 1990-12-17
JPH0714804Y2 true JPH0714804Y2 (ja) 1995-04-10

Family

ID=31585800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5936789U Expired - Lifetime JPH0714804Y2 (ja) 1989-05-22 1989-05-22 レーザ干渉式デポレートモニタ

Country Status (1)

Country Link
JP (1) JPH0714804Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002277218A (ja) * 2001-03-22 2002-09-25 Sharp Corp 膜厚測定装置およびその方法
JP2012220359A (ja) * 2011-04-11 2012-11-12 Tokyo Electron Ltd 基板処理装置に用いられるプロセスモニター装置、プロセスモニター方法、および基板処理装置

Also Published As

Publication number Publication date
JPH02148406U (en]) 1990-12-17

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